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Compact Coating Platform

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Compact Coating Platform is one of the most versatile Sputter coater introduced by MILMAN. Platform is configured around coating zone of Dia. 150 X 300 mm and is surrounded by two 5” x 15” rectangular cathodes as well as two 6” diameter circular cathodes. Equipment is designed to undertake continuous production on small scale. Equipment is able to undertake MoS₂ based coatings.

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MAIN FEATURES:

State of the art compact magnetron sputtering system for continuous 24 x 7 production.
Unique design of MILMAN make magnetron sputtering cathode assemblies with rare earth magnets and DC/pulsed DC/RF compatibility
High vacuum compatible INCONEL based heaters along with PID and thyristorized power supply for precise temperature measurement and control
Pulsed DC magnetron sputtering power supplies with advance arc control, pulse width and frequency control
Pulsed DC bias power supply with facility for ion etching and substrate bias / etch.
PLC-PC based automation for complete process control
Single skid design for complete plug and play operation and fast installation