SEM Coater

PLC/HMI CONTROL

MANUAL PUSH-BUTTON CONTROL

“SEMCOATER”is compact portable table top sputtering equipment specifically designed for deposition of continuous and uniform conducting layer of metals such as Au, Pt etc. on specimen surfaces for scanning electron microscopy applications. Equipment incorporates 57 mm diameter Air cooled magnetron capable of coating 8 stubs of 0.5 inch diameter in one cycle. Main features of the equipment are fast pump down and rapid specimen processing coupled with simple but safe operation with excellent reproducibility. The system can be operated through HMI-PLC based control located on the front panel[1]. High vacuum option including Turbo-molecular pump is also available for deposition of coatings such as Cr, Al etc.

Carbon film evaporation assembly compatible with this coater is offered as option for X-ray micro-analysis applications.

MAIN FEATURES

• COMPLETELY STAND ALONE TABLE TOP MODEL
• UNIQUE DESIGN OF MAGNETRON SPUTTERING TARGET ASSEMBLY WITH EASILY REMOVABLE TARGET / BONDING PLATES
• USER FRIENDLY TOUCH SCREEN COLOUR LCD BASED HMI CONTROL / MANUALLY OPERATED PUSH BUTTON CONTROL
• SPECIMEN HOLDER TO PROVIDE TILT, ROTATION AND DISTANCE ADJUSTMENT (FROM TARGET)
• PROCESS AUTOMATION TO PROVIDE EXECUTION OF PROCESS BY ONE TOUCH*
• CLEAN ROOM COMPATIBLE ENCLOSURE

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CARBON EVAPORATION ASSEMBLY

The assembly can be directly adapted to the MILMAN ‘SEMCOATER’.

MAIN FEATURES:

1. Source assembly designed to directly fit on Glass Chamber of SEMCOATER.
2. Low Tension (LT) Power Supply.
3. Easy to Install.
4. Rugged Mechanical Design