MILMAN THIN FILM SYSTEMS PVT. LTD.
MILMAN THIN FILM SYSTEMS PVT. LTD.
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SERIES 4000A

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MAIN FEATURES:
  • Advanced spin coater with HMI interface
  • Speed range available 0-12000rpm
  • Unlimited multistep recipie programming, storage and recall
  • Independent control over acceleration, spin time and decceleration
  • Closed loop speed control with digital servo drive
  • All safety interlocks for vacuum breakdown, door open and zero speed
  • Wide range of accessories like vacuum pump, hot plate, foot switch etc.

SPIN COATING UNIT model 4000 A series from MILMAN is a multistage HMI interfaced spin coater .This is a special and precise design to coat thin films of photoresists, sol-gels, paints, polymides, anti-reflective and other liquids on substrate sizes upto 4" x 4" upto 6"×6". Available Speed range is 0-12000 RPM. The unit is fully programmable and user friendly. The spin coating unit is provided with Top plate assembly, motor assembly, safety interlocks, vacuum chuck and wide range of accessories.

TYPICAL PROCESS RESPONSE GRAPH

GENERAL FEATURES:
  1. 9"Ø PTFE coated S.S / Polypropylene bowl with drain and N2 purge connection.
  2. Acrylic bowl cover.
  3. Custom built vacuum chuck (for substrates with diameter 3" or greater).
  4. Direct indication for vacuum at chuck.
  5. Electromagnetic vacuum release along with integrated manual vacuum release.
  6. Utilities connections are at the rear of unit.
  7. Real Time Graph of Speed Vs Time.
SPEED:
  1. Spin speed range from 0 to 12000 RPM.
  2. Acceleration/ Deceleration : 5000 RPM/sec.
  3. Closed loop speed control.
PROGRAMMABILITY:
  1. User friendly software.
  2. Programmable multi steps.
  3. For each step speed, time, acceleration are programmable.
  4. Unlimited recipes can be stored for substrate.
  5. Any recipe (program) can be viewed, modified and run.
CYCLE RUN:
  1. 250 RPM run (inch) even with interlocks not O.K.
  2. Recipe mode: select and run recipe from stored set.
  3. Program mode: set all parameters; save and run.
INTERLOCKS:
  1. Vacuum interlock.
  2. Door open interlock.
  3. Zero speed interlock.
  4. System ready indicator.
  5. Auxiliary’ interlock for future use.
ACCESSORIES ( OPTIONAL ):
  1. N2 purge facility.
  2. Vacuum pump.
  3. 250uL micro syringe.
  4. Auto liquid dispenser.
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MILMAN THIN FILM SYSTEMS PVT. LTD.
322 A 1,2 & 3 , Vishwachaya Industry Road
PIRANGUT, PUNE 412115,
Maharashtra, INDIA.
Mobile: +91 98814 70865
Phone: +91 788085401 / 7888085404 / 7888085405
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